# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | N. Herguedas and E. Carretero. Optical properties in mid-infrared range of silicon oxide thin films with different stoichiometries. Nanomaterials 13, 2749 (2023) COMMENTS: | SiO_0.61. Sputtered Si with 20 sccm O₂ and 180 sccm Ar, which is equivalent to a oxygen partial pressure of 1.8 × 10^-4 mbar and a total pressure of 1.8 × 10^-3 mbar. Room temperature. DATA: - type: tabulated nk data: | 5.000 2.594 0.000 5.005 2.594 0.000 5.010 2.594 0.000 5.015 2.594 0.000 5.020 2.593 0.000 5.025 2.593 0.000 5.030 2.593 0.000 5.035 2.593 0.000 5.040 2.593 0.000 5.045 2.593 0.000 5.051 2.593 0.000 5.056 2.593 0.000 5.061 2.593 0.000 5.066 2.592 0.000 5.071 2.592 0.000 5.076 2.592 0.000 5.081 2.592 0.000 5.086 2.592 0.000 5.092 2.592 0.000 5.097 2.592 0.000 5.102 2.592 0.000 5.107 2.591 0.000 5.112 2.591 0.000 5.118 2.591 0.000 5.123 2.591 0.000 5.128 2.591 0.000 5.133 2.591 0.000 5.139 2.591 0.000 5.144 2.591 0.000 5.149 2.590 0.000 5.155 2.590 0.000 5.160 2.590 0.000 5.165 2.590 0.000 5.171 2.590 0.000 5.176 2.590 0.000 5.181 2.590 0.000 5.187 2.590 0.000 5.192 2.589 0.000 5.198 2.589 0.000 5.203 2.589 0.000 5.208 2.589 0.000 5.214 2.589 0.000 5.219 2.589 0.000 5.225 2.589 0.000 5.230 2.588 0.000 5.236 2.588 0.000 5.241 2.588 0.000 5.247 2.588 0.000 5.252 2.588 0.000 5.258 2.588 0.000 5.263 2.588 0.000 5.269 2.588 0.000 5.274 2.587 0.000 5.280 2.587 0.000 5.285 2.587 0.000 5.291 2.587 0.000 5.297 2.587 0.000 5.302 2.587 0.000 5.308 2.587 0.000 5.313 2.586 0.000 5.319 2.586 0.000 5.325 2.586 0.000 5.330 2.586 0.000 5.336 2.586 0.000 5.342 2.586 0.000 5.348 2.585 0.000 5.353 2.585 0.000 5.359 2.585 0.000 5.365 2.585 0.000 5.371 2.585 0.000 5.376 2.585 0.000 5.382 2.585 0.001 5.388 2.584 0.001 5.394 2.584 0.001 5.400 2.584 0.001 5.405 2.584 0.001 5.411 2.584 0.001 5.417 2.584 0.001 5.423 2.583 0.001 5.429 2.583 0.001 5.435 2.583 0.001 5.441 2.583 0.001 5.447 2.583 0.001 5.453 2.583 0.001 5.459 2.583 0.001 5.464 2.582 0.001 5.470 2.582 0.001 5.476 2.582 0.001 5.482 2.582 0.001 5.488 2.582 0.001 5.495 2.582 0.001 5.501 2.581 0.001 5.507 2.581 0.001 5.513 2.581 0.001 5.519 2.581 0.001 5.525 2.581 0.001 5.531 2.580 0.001 5.537 2.580 0.001 5.543 2.580 0.001 5.549 2.580 0.001 5.556 2.580 0.001 5.562 2.580 0.001 5.568 2.579 0.001 5.574 2.579 0.001 5.580 2.579 0.001 5.587 2.579 0.001 5.593 2.579 0.001 5.599 2.579 0.001 5.605 2.578 0.001 5.612 2.578 0.001 5.618 2.578 0.001 5.624 2.578 0.001 5.631 2.578 0.001 5.637 2.577 0.001 5.643 2.577 0.001 5.650 2.577 0.001 5.656 2.577 0.001 5.663 2.577 0.001 5.669 2.576 0.001 5.675 2.576 0.001 5.682 2.576 0.001 5.688 2.576 0.001 5.695 2.576 0.001 5.701 2.575 0.001 5.708 2.575 0.001 5.714 2.575 0.001 5.721 2.575 0.001 5.727 2.575 0.001 5.734 2.574 0.001 5.741 2.574 0.001 5.747 2.574 0.001 5.754 2.574 0.001 5.760 2.574 0.001 5.767 2.573 0.001 5.774 2.573 0.001 5.780 2.573 0.001 5.787 2.573 0.001 5.794 2.573 0.001 5.800 2.572 0.001 5.807 2.572 0.001 5.814 2.572 0.001 5.821 2.572 0.001 5.828 2.571 0.001 5.834 2.571 0.001 5.841 2.571 0.001 5.848 2.571 0.001 5.855 2.571 0.001 5.862 2.570 0.002 5.869 2.570 0.002 5.875 2.570 0.002 5.882 2.570 0.002 5.889 2.569 0.002 5.896 2.569 0.002 5.903 2.569 0.002 5.910 2.569 0.002 5.917 2.568 0.002 5.924 2.568 0.002 5.931 2.568 0.002 5.938 2.568 0.002 5.945 2.567 0.002 5.952 2.567 0.002 5.959 2.567 0.002 5.967 2.567 0.002 5.974 2.566 0.002 5.981 2.566 0.002 5.988 2.566 0.002 5.995 2.566 0.002 6.002 2.565 0.002 6.010 2.565 0.002 6.017 2.565 0.002 6.024 2.565 0.002 6.031 2.564 0.002 6.039 2.564 0.002 6.046 2.564 0.002 6.053 2.564 0.002 6.061 2.563 0.002 6.068 2.563 0.002 6.075 2.563 0.002 6.083 2.563 0.002 6.090 2.562 0.002 6.098 2.562 0.002 6.105 2.562 0.002 6.112 2.561 0.002 6.120 2.561 0.002 6.127 2.561 0.003 6.135 2.561 0.003 6.143 2.560 0.003 6.150 2.560 0.003 6.158 2.560 0.003 6.165 2.559 0.003 6.173 2.559 0.003 6.180 2.559 0.003 6.188 2.559 0.003 6.196 2.558 0.003 6.203 2.558 0.003 6.211 2.558 0.003 6.219 2.557 0.003 6.227 2.557 0.003 6.234 2.557 0.003 6.242 2.556 0.003 6.250 2.556 0.003 6.258 2.556 0.003 6.266 2.555 0.003 6.274 2.555 0.003 6.281 2.555 0.003 6.289 2.555 0.003 6.297 2.554 0.003 6.305 2.554 0.003 6.313 2.554 0.003 6.321 2.553 0.004 6.329 2.553 0.004 6.337 2.553 0.004 6.345 2.552 0.004 6.353 2.552 0.004 6.361 2.552 0.004 6.369 2.551 0.004 6.378 2.551 0.004 6.386 2.551 0.004 6.394 2.550 0.004 6.402 2.550 0.004 6.410 2.549 0.004 6.418 2.549 0.004 6.427 2.549 0.004 6.435 2.548 0.004 6.443 2.548 0.004 6.452 2.548 0.004 6.460 2.547 0.004 6.468 2.547 0.004 6.477 2.547 0.005 6.485 2.546 0.005 6.494 2.546 0.005 6.502 2.545 0.005 6.510 2.545 0.005 6.519 2.545 0.005 6.527 2.544 0.005 6.536 2.544 0.005 6.545 2.543 0.005 6.553 2.543 0.005 6.562 2.543 0.005 6.570 2.542 0.005 6.579 2.542 0.005 6.588 2.541 0.005 6.596 2.541 0.005 6.605 2.541 0.005 6.614 2.540 0.006 6.623 2.540 0.006 6.631 2.539 0.006 6.640 2.539 0.006 6.649 2.539 0.006 6.658 2.538 0.006 6.667 2.538 0.006 6.676 2.537 0.006 6.684 2.537 0.006 6.693 2.536 0.006 6.702 2.536 0.006 6.711 2.535 0.006 6.720 2.535 0.006 6.729 2.535 0.006 6.739 2.534 0.007 6.748 2.534 0.007 6.757 2.533 0.007 6.766 2.533 0.007 6.775 2.532 0.007 6.784 2.532 0.007 6.793 2.531 0.007 6.803 2.531 0.007 6.812 2.530 0.007 6.821 2.530 0.007 6.831 2.529 0.007 6.840 2.529 0.008 6.849 2.528 0.008 6.859 2.528 0.008 6.868 2.527 0.008 6.878 2.527 0.008 6.887 2.526 0.008 6.897 2.526 0.008 6.906 2.525 0.008 6.916 2.525 0.008 6.925 2.524 0.008 6.935 2.524 0.008 6.944 2.523 0.009 6.954 2.522 0.009 6.964 2.522 0.009 6.974 2.521 0.009 6.983 2.521 0.009 6.993 2.520 0.009 7.003 2.520 0.009 7.013 2.519 0.009 7.022 2.518 0.009 7.032 2.518 0.010 7.042 2.517 0.010 7.052 2.517 0.010 7.062 2.516 0.010 7.072 2.515 0.010 7.082 2.515 0.010 7.092 2.514 0.010 7.102 2.514 0.010 7.112 2.513 0.010 7.123 2.512 0.011 7.133 2.512 0.011 7.143 2.511 0.011 7.153 2.510 0.011 7.163 2.510 0.011 7.174 2.509 0.011 7.184 2.508 0.011 7.194 2.508 0.011 7.205 2.507 0.012 7.215 2.506 0.012 7.225 2.506 0.012 7.236 2.505 0.012 7.246 2.504 0.012 7.257 2.503 0.012 7.267 2.503 0.012 7.278 2.502 0.013 7.289 2.501 0.013 7.299 2.500 0.013 7.310 2.500 0.013 7.321 2.499 0.013 7.331 2.498 0.013 7.342 2.497 0.013 7.353 2.496 0.014 7.364 2.496 0.014 7.375 2.495 0.014 7.386 2.494 0.014 7.396 2.493 0.014 7.407 2.492 0.014 7.418 2.491 0.014 7.429 2.491 0.015 7.440 2.490 0.015 7.452 2.489 0.015 7.463 2.488 0.015 7.474 2.487 0.015 7.485 2.486 0.015 7.496 2.485 0.016 7.508 2.484 0.016 7.519 2.483 0.016 7.530 2.482 0.016 7.541 2.481 0.016 7.553 2.480 0.017 7.564 2.479 0.017 7.576 2.478 0.017 7.587 2.477 0.017 7.599 2.476 0.017 7.610 2.475 0.018 7.622 2.474 0.018 7.634 2.473 0.018 7.645 2.472 0.018 7.657 2.470 0.018 7.669 2.469 0.019 7.680 2.468 0.019 7.692 2.467 0.019 7.704 2.466 0.019 7.716 2.464 0.019 7.728 2.463 0.020 7.740 2.462 0.020 7.752 2.461 0.020 7.764 2.459 0.020 7.776 2.458 0.021 7.788 2.456 0.021 7.800 2.455 0.021 7.812 2.454 0.021 7.825 2.452 0.022 7.837 2.451 0.022 7.849 2.449 0.022 7.862 2.448 0.022 7.874 2.446 0.023 7.886 2.444 0.023 7.899 2.443 0.023 7.911 2.441 0.024 7.924 2.439 0.024 7.937 2.438 0.024 7.949 2.436 0.025 7.962 2.434 0.025 7.974 2.432 0.026 7.987 2.430 0.026 8.000 2.428 0.026 8.013 2.426 0.027 8.026 2.424 0.027 8.039 2.422 0.028 8.052 2.420 0.028 8.065 2.418 0.029 8.078 2.415 0.030 8.091 2.413 0.030 8.104 2.411 0.031 8.117 2.408 0.031 8.130 2.406 0.032 8.143 2.403 0.033 8.157 2.401 0.034 8.170 2.398 0.035 8.183 2.396 0.035 8.197 2.393 0.036 8.210 2.390 0.037 8.224 2.387 0.038 8.237 2.384 0.040 8.251 2.381 0.041 8.264 2.378 0.042 8.278 2.375 0.043 8.292 2.372 0.045 8.306 2.369 0.046 8.319 2.365 0.048 8.333 2.362 0.049 8.347 2.359 0.051 8.361 2.355 0.053 8.375 2.352 0.055 8.389 2.348 0.057 8.403 2.344 0.059 8.418 2.341 0.062 8.432 2.337 0.064 8.446 2.333 0.067 8.460 2.329 0.069 8.475 2.325 0.072 8.489 2.321 0.075 8.503 2.317 0.078 8.518 2.313 0.082 8.532 2.309 0.085 8.547 2.305 0.089 8.562 2.301 0.093 8.576 2.297 0.097 8.591 2.293 0.101 8.606 2.289 0.106 8.621 2.285 0.110 8.636 2.281 0.115 8.651 2.276 0.120 8.666 2.273 0.125 8.681 2.269 0.131 8.696 2.265 0.137 8.711 2.261 0.143 8.726 2.257 0.149 8.741 2.254 0.155 8.757 2.250 0.162 8.772 2.247 0.169 8.787 2.243 0.176 8.803 2.240 0.184 8.818 2.237 0.191 8.834 2.234 0.199 8.850 2.232 0.207 8.865 2.229 0.216 8.881 2.227 0.224 8.897 2.225 0.233 8.913 2.224 0.242 8.929 2.222 0.252 8.945 2.221 0.261 8.961 2.220 0.271 8.977 2.220 0.281 8.993 2.219 0.291 9.009 2.219 0.301 9.025 2.220 0.311 9.042 2.221 0.322 9.058 2.222 0.332 9.074 2.223 0.343 9.091 2.225 0.353 9.107 2.228 0.364 9.124 2.230 0.375 9.141 2.234 0.386 9.158 2.237 0.397 9.174 2.241 0.408 9.191 2.246 0.418 9.208 2.251 0.429 9.225 2.256 0.440 9.242 2.262 0.450 9.259 2.268 0.461 9.276 2.274 0.471 9.294 2.281 0.481 9.311 2.289 0.491 9.328 2.297 0.501 9.346 2.305 0.510 9.363 2.313 0.520 9.381 2.322 0.529 9.398 2.332 0.537 9.416 2.341 0.546 9.434 2.351 0.554 9.452 2.362 0.561 9.470 2.372 0.569 9.488 2.383 0.576 9.506 2.395 0.582 9.524 2.406 0.589 9.542 2.418 0.594 9.560 2.430 0.600 9.579 2.442 0.605 9.597 2.454 0.609 9.615 2.467 0.613 9.634 2.479 0.617 9.653 2.492 0.620 9.671 2.505 0.623 9.690 2.518 0.625 9.709 2.531 0.627 9.728 2.544 0.628 9.747 2.557 0.629 9.766 2.570 0.630 9.785 2.583 0.630 9.804 2.596 0.629 9.823 2.608 0.628 9.843 2.621 0.627 9.862 2.634 0.625 9.881 2.646 0.623 9.901 2.659 0.620 9.921 2.671 0.617 9.940 2.683 0.613 9.960 2.695 0.609 9.980 2.707 0.605 10.000 2.718 0.600 10.020 2.730 0.595 10.040 2.741 0.590 10.060 2.752 0.584 10.081 2.762 0.578 10.101 2.772 0.572 10.121 2.782 0.565 10.142 2.792 0.558 10.163 2.801 0.551 10.183 2.810 0.543 10.204 2.819 0.535 10.225 2.827 0.527 10.246 2.835 0.519 10.267 2.842 0.511 10.288 2.849 0.502 10.309 2.856 0.493 10.331 2.863 0.485 10.352 2.869 0.476 10.373 2.875 0.466 10.395 2.880 0.457 10.417 2.885 0.448 10.438 2.890 0.439 10.460 2.894 0.429 10.482 2.898 0.420 10.504 2.901 0.410 10.526 2.904 0.401 10.549 2.907 0.392 10.571 2.910 0.382 10.593 2.912 0.373 10.616 2.914 0.364 10.638 2.915 0.354 10.661 2.916 0.345 10.684 2.917 0.336 10.707 2.917 0.327 10.730 2.918 0.319 10.753 2.918 0.310 10.776 2.917 0.301 10.799 2.916 0.293 10.823 2.916 0.285 10.846 2.914 0.277 10.870 2.913 0.269 10.893 2.911 0.261 10.917 2.910 0.254 10.941 2.908 0.246 10.965 2.905 0.239 10.989 2.903 0.232 11.013 2.900 0.226 11.038 2.898 0.219 11.062 2.895 0.213 11.086 2.892 0.207 11.111 2.888 0.201 11.136 2.885 0.195 11.161 2.882 0.190 11.186 2.878 0.185 11.211 2.875 0.180 11.236 2.871 0.175 11.261 2.867 0.170 11.287 2.864 0.166 11.312 2.860 0.162 11.338 2.856 0.158 11.364 2.852 0.154 11.390 2.848 0.151 11.416 2.844 0.147 11.442 2.841 0.144 11.468 2.837 0.141 11.494 2.833 0.138 11.521 2.829 0.136 11.547 2.825 0.133 11.574 2.821 0.131 11.601 2.817 0.129 11.628 2.814 0.127 11.655 2.810 0.125 11.682 2.806 0.123 11.710 2.803 0.122 11.737 2.799 0.120 11.765 2.796 0.119 11.792 2.792 0.118 11.820 2.789 0.117 11.848 2.785 0.116 11.876 2.782 0.115 11.905 2.779 0.114 11.933 2.776 0.113 11.962 2.773 0.113 11.990 2.770 0.112 12.019 2.767 0.112 12.048 2.764 0.111 12.077 2.761 0.111 12.107 2.758 0.111 12.136 2.756 0.111 12.165 2.753 0.111 12.195 2.751 0.111 12.225 2.748 0.111 12.255 2.746 0.111 12.285 2.743 0.111 12.315 2.741 0.111 12.346 2.739 0.111 12.376 2.737 0.112 12.407 2.735 0.112 12.438 2.732 0.112 12.469 2.731 0.112 12.500 2.729 0.113 12.531 2.727 0.113 12.563 2.725 0.114 12.594 2.723 0.114 12.626 2.721 0.114 12.658 2.720 0.115 12.690 2.718 0.115 12.723 2.716 0.116 12.755 2.715 0.116 12.788 2.713 0.117 12.821 2.712 0.117 12.853 2.710 0.118 12.887 2.709 0.118 12.920 2.708 0.119 12.953 2.706 0.120 12.987 2.705 0.120 13.021 2.704 0.121 13.055 2.703 0.121 13.089 2.702 0.122 13.123 2.700 0.122 13.158 2.699 0.123 13.193 2.698 0.124 13.228 2.697 0.124 13.263 2.696 0.125 13.298 2.695 0.125 13.333 2.694 0.126 13.369 2.693 0.127 13.405 2.692 0.127 13.441 2.691 0.128 13.477 2.691 0.129 13.514 2.690 0.129 13.550 2.689 0.130 13.587 2.688 0.130 13.624 2.687 0.131 13.661 2.686 0.132 13.699 2.686 0.132 13.736 2.685 0.133 13.774 2.684 0.134 13.812 2.684 0.134 13.850 2.683 0.135 13.889 2.682 0.135 13.928 2.681 0.136 13.966 2.681 0.137 14.006 2.680 0.137 14.045 2.680 0.138 14.085 2.679 0.139 14.124 2.678 0.139 14.164 2.678 0.140 14.205 2.677 0.141 14.245 2.677 0.141 14.286 2.676 0.142 14.327 2.676 0.142 14.368 2.675 0.143 14.409 2.675 0.144 14.451 2.674 0.144 14.493 2.674 0.145 14.535 2.673 0.146 14.577 2.673 0.146 14.620 2.673 0.147 14.663 2.672 0.148 14.706 2.672 0.148 14.749 2.671 0.149 14.793 2.671 0.150 14.837 2.671 0.150 14.881 2.670 0.151 14.925 2.670 0.151 14.970 2.669 0.152 15.015 2.669 0.153 15.060 2.669 0.153 15.106 2.668 0.154 15.152 2.668 0.155 15.198 2.668 0.155 15.244 2.667 0.156 15.291 2.667 0.157 15.337 2.667 0.157 15.385 2.667 0.158 15.432 2.666 0.159 15.480 2.666 0.159 15.528 2.666 0.160 15.576 2.666 0.161 15.625 2.665 0.161 15.674 2.665 0.162 15.723 2.665 0.162 15.773 2.665 0.163 15.823 2.664 0.164 15.873 2.664 0.164 15.924 2.664 0.165 15.974 2.664 0.166 16.026 2.663 0.166 16.077 2.663 0.167 16.129 2.663 0.168 16.181 2.663 0.168 16.234 2.663 0.169 16.287 2.662 0.170 16.340 2.662 0.170 16.393 2.662 0.171 16.447 2.662 0.172 16.502 2.662 0.172 16.556 2.662 0.173 16.611 2.661 0.174 16.667 2.661 0.174 16.722 2.661 0.175 16.779 2.661 0.176 16.835 2.661 0.176 16.892 2.661 0.177 16.949 2.660 0.178 17.007 2.660 0.178 17.065 2.660 0.179 17.123 2.660 0.180 17.182 2.660 0.180 17.241 2.660 0.181 17.301 2.659 0.182 17.361 2.659 0.182 17.422 2.659 0.183 17.483 2.659 0.184 17.544 2.659 0.184 17.606 2.659 0.185 17.668 2.659 0.186 17.730 2.658 0.186 17.794 2.658 0.187 17.857 2.658 0.188 17.921 2.658 0.188 17.986 2.658 0.189 18.051 2.657 0.190 18.116 2.657 0.190 18.182 2.657 0.191 18.248 2.657 0.192 18.315 2.657 0.192 18.382 2.656 0.193 18.450 2.656 0.194 18.519 2.656 0.195 18.587 2.656 0.195 18.657 2.655 0.196 18.727 2.655 0.197 18.797 2.655 0.197 18.868 2.655 0.198 18.939 2.654 0.199 19.011 2.654 0.200 19.084 2.654 0.200 19.157 2.653 0.201 19.231 2.653 0.202 19.305 2.652 0.202 19.380 2.652 0.203 19.455 2.652 0.204 19.531 2.651 0.205 19.608 2.651 0.205 19.685 2.650 0.206 19.763 2.650 0.207 19.841 2.649 0.208 19.920 2.648 0.209 20.000 2.648 0.209 20.080 2.647 0.210 20.161 2.646 0.211 20.243 2.645 0.212 20.325 2.644 0.213 20.408 2.643 0.213 20.492 2.642 0.214 20.576 2.641 0.215 20.661 2.640 0.216 20.747 2.639 0.217 20.833 2.637 0.218 20.921 2.636 0.219 21.008 2.634 0.220 21.097 2.632 0.221 21.186 2.630 0.222 21.277 2.628 0.223 21.368 2.625 0.224 21.459 2.623 0.225 21.552 2.619 0.227 21.645 2.616 0.228 21.739 2.612 0.230 21.834 2.607 0.232 21.930 2.602 0.235 22.026 2.596 0.238 22.124 2.590 0.243 22.222 2.583 0.248 22.321 2.575 0.254 22.422 2.567 0.263 22.523 2.559 0.273 22.624 2.551 0.286 22.727 2.544 0.302 22.831 2.539 0.320 22.936 2.536 0.341 23.041 2.536 0.364 23.148 2.541 0.389 23.256 2.550 0.414 23.364 2.564 0.439 23.474 2.583 0.462 23.585 2.607 0.482 23.697 2.635 0.498 23.810 2.666 0.508 23.923 2.698 0.513 24.038 2.731 0.512 24.155 2.763 0.505 24.272 2.792 0.493 24.390 2.817 0.477 24.510 2.839 0.457 24.631 2.856 0.435 24.752 2.868 0.411 24.876 2.876 0.387 25.000 2.879 0.365